ISO 14644-1 Cleanroom Classification

ISO Classification number (N) CLASS LIMITS (particles/m3)
Maximum concentration limits (particles/m3) for particles equal to or larger than the considered sizes below 		Federal Standard 209E Class
0.1um 0.2um 0.3um 0.5um 1um 5um
ISO Class 1 10 2          
ISO Class 2 100 24 10 4      
ISO Class 3 1000 237 102 35 8   Class 1
ISO Class 4 10000 2370 1020 352 83   Class 10
ISO Class 5 100000 23700 10200 3520 832 29 Class 100
ISO Class 6 1000000 237000 102000 35200 8320 293 Class 1000
ISO Class 7       352000 83200 2930 Class 10000
ISO Class 8       3520000 832000 29300 Class 100000
ISO Class 9       35200000 8320000 293000  

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